A self-tuning resonance-locking method for polymer MEMS microscanners

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dc.authorid0009-0002-8877-0482
dc.contributor.authorAlcicek, Berkay
dc.contributor.authorArseven, Aysin
dc.contributor.authorSarioglu, Baykal
dc.contributor.authorGokdel, Y. Daghan
dc.date.accessioned2026-04-04T18:55:44Z
dc.date.available2026-04-04T18:55:44Z
dc.date.issued2026
dc.departmentİstanbul Bilgi Üniversitesi
dc.description.abstractThis study presents a self-tuning optical MEMS microscanner based on a low-cost polyimide structure integrated with a piezoresistive feedback mechanism. The system automatically detects and tracks the torsional resonance frequency (approximate to 81 Hz), compensating for spring softening effects that otherwise degrade scan performance. A custom frequency sweep algorithm, combined with a closed-loop control, dynamically adjusts the actuation signal to maintain resonance-locked operation, enabling stable mechanical scan angles of 10-12 degrees ( approximate to 42 degrees total optical scan angle (TOSA)) at drive levels of 8-10 Vpp and 60-80 mA ( approximate to 0.5z-0.8W). This approach ensures stable displacement and total optical scan angle over time, even under frequency drift. In high-power characterization sweeps, the device demonstrates optical scan angles up to 100 degrees TOSA. The proposed architecture offers a practical and scalable solution for energy-efficient, high-resolution optical scanning using inexpensive and easily manufacturable polymer-based MEMS devices.
dc.description.sponsorshipScientific Research Fund of Idot;stanbul Bilgi University (BAP) [2019.02.019]
dc.description.sponsorshipThis work was supported by the Scientific Research Fund of & Idot;stanbul Bilgi University (BAP) under project grant titled 'Development of a MEMS scanner-based miniaturized projection display'.
dc.identifier.doi10.1088/1361-6439/ae4406
dc.identifier.doi10.1088/1361-6439/ae4406
dc.identifier.issn0960-1317
dc.identifier.issn1361-6439
dc.identifier.issue2
dc.identifier.urihttps://doi.org/10.1088/1361-6439/ae4406
dc.identifier.urihttps://hdl.handle.net/11411/10549
dc.identifier.volume36
dc.identifier.wosWOS:001697514900001
dc.identifier.wosqualityQ3
dc.indekslendigikaynakWeb of Science
dc.language.isoen
dc.publisherIop Publishing Ltd
dc.relation.ispartofJournal of Micromechanics and Microengineering
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanı
dc.rightsinfo:eu-repo/semantics/closedAccess
dc.snmzKA_WoS_20260402
dc.subjectMems
dc.subjectResonant Mode
dc.subjectSelf-Tuning
dc.subjectPiezoresistivity
dc.subjectMicroscanner
dc.subjectSpring-Softening Effect
dc.subjectTotal Optical Scan Angle
dc.titleA self-tuning resonance-locking method for polymer MEMS microscanners
dc.typeArticle

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