3D Printed Capacitive Pressure Sensor with Corrugated Surface
Küçük Resim Yok
Tarih
2017
Dergi Başlığı
Dergi ISSN
Cilt Başlığı
Yayıncı
IEEE
Erişim Hakkı
info:eu-repo/semantics/closedAccess
Özet
In this work a novel 3D printed capacitive pressure sensor with a corrugated surface is presented. The design composed of top and bottom plates. The sensor is 3D printed using a commercially available polymer material and then coated with Cr and Au with sputtering process. The dimensions of produced structure that designed is 11x11x4.6mm(3). Due to the corrugated surface, the area of the plates is increased 19.46% compared to a standard flat surface parallel plate capacitive sensor in the same bulk area. The design process of the sensor, simulation and the experimental results are given and explained in detail. The performance of the sensor is tested with various pressure levels between 0 Pa and 8.88 kPa. The experimental results show that the capacitance range of the sensor is 2.7 pF-4.3 pF. The maximum sensitivity of the sensor is obtained as 0.14 pF / kPa. The results confirm that the presented capacitive sensor can be utilized for carrying out pressure measurements.
Açıklama
13th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME) / 14th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Application to Circuit Design (SMACD) -- JUN 12-15, 2017 -- ITALY
Anahtar Kelimeler
Microfabrication, Silicon
Kaynak
2017 13th Conference on Ph.D. Research in Microelectronics and Electronics (Prime)
WoS Q Değeri
N/A
Scopus Q Değeri
N/A
