3D Printed Capacitive Pressure Sensor with Corrugated Surface

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dc.authoridSarioglu, Baykal/0000-0002-7433-3823|Gökdel, Yiğit Dağhan/0000-0003-4634-4733
dc.authorwosidSarioglu, Baykal/AAO-4915-2020
dc.authorwosidGökdel, Yiğit Dağhan/AAO-4840-2020
dc.contributor.authorTuna, Ahmet
dc.contributor.authorErden, Oguz K.
dc.contributor.authorGokdel, Y. Daghan
dc.contributor.authorSarioglu, Baykal
dc.date.accessioned2024-07-18T20:50:58Z
dc.date.available2024-07-18T20:50:58Z
dc.date.issued2017
dc.departmentİstanbul Bilgi Üniversitesien_US
dc.description13th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME) / 14th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Application to Circuit Design (SMACD) -- JUN 12-15, 2017 -- ITALYen_US
dc.description.abstractIn this work a novel 3D printed capacitive pressure sensor with a corrugated surface is presented. The design composed of top and bottom plates. The sensor is 3D printed using a commercially available polymer material and then coated with Cr and Au with sputtering process. The dimensions of produced structure that designed is 11x11x4.6mm(3). Due to the corrugated surface, the area of the plates is increased 19.46% compared to a standard flat surface parallel plate capacitive sensor in the same bulk area. The design process of the sensor, simulation and the experimental results are given and explained in detail. The performance of the sensor is tested with various pressure levels between 0 Pa and 8.88 kPa. The experimental results show that the capacitance range of the sensor is 2.7 pF-4.3 pF. The maximum sensitivity of the sensor is obtained as 0.14 pF / kPa. The results confirm that the presented capacitive sensor can be utilized for carrying out pressure measurements.en_US
dc.description.sponsorshipMicron Fdn,ST Microelectron,Dialog Semicond,ON Semicond,Cadence Acad Network,Coilcraft,Texas Instruments,InvenSense,River Publishers,Assoc Culturale Elect Events,IEEE,IEEE Circuits & Syst Soc,IEEE Circuits & Syst Soc Chapter C & A Italy Sect,IEEE Solid State Circuits Soc Italian Chapter,Univ Studi Catania, Dept Ingn Elettrica Elettronica Informatica,IEEE Council Elect Design Automat,Univ Salerno, Dept Informat & Elect Engn & Appl Mathen_US
dc.description.sponsorshipScientific and Technological Research Council of Turkey (TUBITAK) [EEEAG 114E549]en_US
dc.description.sponsorshipThis work is supported by The Scientific and Technological Research Council of Turkey (TUBITAK) under project number EEEAG 114E549.en_US
dc.identifier.endpage152en_US
dc.identifier.isbn978-1-5090-6508-0
dc.identifier.scopus2-s2.0-85027548912en_US
dc.identifier.scopusqualityN/Aen_US
dc.identifier.startpage149en_US
dc.identifier.urihttps://hdl.handle.net/11411/8325
dc.identifier.wosWOS:000426907000038en_US
dc.identifier.wosqualityN/Aen_US
dc.indekslendigikaynakWeb of Scienceen_US
dc.indekslendigikaynakScopusen_US
dc.language.isoenen_US
dc.publisherIEEEen_US
dc.relation.ispartof2017 13th Conference on Ph.D. Research in Microelectronics and Electronics (Prime)en_US
dc.relation.publicationcategoryKonferans Öğesi - Uluslararası - Kurum Öğretim Elemanıen_US
dc.rightsinfo:eu-repo/semantics/closedAccessen_US
dc.subjectMicrofabricationen_US
dc.subjectSiliconen_US
dc.title3D Printed Capacitive Pressure Sensor with Corrugated Surfaceen_US
dc.typeConference Objecten_US

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